Studies on passivation behavior of tungsten in application to chemical mechanical polishing
- 1 July 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 17 (4) , 1168-1173
- https://doi.org/10.1116/1.581790
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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