Optical Roughness Measuring Instrument For Fine-Machined Surfaces
- 1 June 1985
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 24 (3) , 243408-243408-
- https://doi.org/10.1117/12.7973497
Abstract
The roughness measuring instrument described is based on light scattering and is suitable in a wide range of applications, especially in micro-machining. The most important properties are the sensitivity in the measuring range from below 0.005 i.im up to 2µm (Ra value), the independence of the reflection coefficient due to normalization, and the larger tolerance of measur-ing distance of ±2 mm.Keywords
This publication has 0 references indexed in Scilit: