A plasma immersion ion implantation reactor for ULSI fabrication
- 1 April 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 55 (1-4) , 884-887
- https://doi.org/10.1016/0168-583x(91)96300-a
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Plasma characterization for a divergent field electron cyclotron resonance sourceJournal of Vacuum Science & Technology A, 1989
- Plasma immersion ion implantation using plasmas generated by radio frequency techniquesApplied Physics Letters, 1988
- Plasma source ion-implantation technique for surface modification of materialsJournal of Applied Physics, 1987