Electrode-induced degradation of Pb(ZrxTi1−x)O3 (PZT) polarization hysteresis characteristics in Pt/PZT/Pt ferroelectric thin-film capacitors

Abstract
One of the most serious forms of damage that occurs during the integration of Pt/PZT/Pt ferroelectriccapacitors [where PZT is Pb(Zr x Ti1−x )O3] is the disappearance of polarizationhysteresischaracteristics during the passivation process. The hydrogen content of the atmosphere during this process affects the ferroelectriccapacitorcharacteristics. However, the PZT film itself is not damaged by annealing in a hydrogen‐containing atmosphere even at 400 °C, whereas the Pt/PZT/Pt ferroelectriccapacitor loses its polarizationhysteresischaracteristics at 300 °C. The top Pt electrode was found to induce this damage. Possible mechanisms such as stress and a chemical reaction with the Pt catalyst are discussed.

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