Laser-Induced Chemistry for Microelectronics
- 15 February 1985
- journal article
- research article
- Published by American Association for the Advancement of Science (AAAS) in Science
- Vol. 227 (4688) , 709-714
- https://doi.org/10.1126/science.227.4688.709
Abstract
Laser-controlled chemical reactions are being explored for use in all phases of the processing of semiconductor devices. Laser-induced chemical processing can produce submicrometer features without the aid of photolithography. Research is also providing new information on light-excited and light-enhanced interface reactions.Keywords
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