Micro-extraction fields to improve electron beam test measurements
- 1 March 1991
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 13 (1) , 519-522
- https://doi.org/10.1016/0167-9317(91)90145-4
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A time-of-flight voltage contrast detector for measurements on VLSI circuitsMeasurement Science and Technology, 1990
- Computational tools to analyze voltage contrast detectorsJournal of Vacuum Science & Technology B, 1988
- Microfields in stroboscopic voltage measurements via electron emisson. II. Effects on electron dynamicsJournal of Applied Physics, 1987
- Digital techniques for improved voltage measurementsScanning, 1985