SSIMS identification of surface intermediates in the thermal decomposition of TMGa on Si(100)
- 15 January 1992
- journal article
- Published by Elsevier in Surface Science
- Vol. 261 (1-3) , 99-110
- https://doi.org/10.1016/0039-6028(92)90221-q
Abstract
No abstract availableKeywords
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