Surface Mobility on Silicon from Acoustoelectric Current Measurements

• 1 January 1972
• proceedings article
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 181-185
• https://doi.org/10.1109/ultsym.1972.196058

Abstract

Keywords

• SILICON
• CURRENT MEASUREMENT
• ELECTRON TRAPS
• FREQUENCY
• SURFACE WAVES
• SURFACE ACOUSTIC WAVES
• SURFACE RESISTANCE
• SIGNAL ANALYSIS
• CONDUCTIVITY
• POTENTIAL WELL