The Redistribution of Gold during the Growth of an Oxide or of Phosphosilicate Glass on Contaminated Silicon Wafers
- 1 October 1976
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 123 (10) , 1560-1565
- https://doi.org/10.1149/1.2132637
Abstract
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