A digital quartz deposition monitor using a microprocessor
- 1 February 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 32 (1) , 47-50
- https://doi.org/10.1016/0040-6090(76)90552-6
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Investigation of film-thickness determination by oscillating quartz resonators with large mass loadJournal of Applied Physics, 1972
- Long-Term Operation of Crystal Oscillators in Thin-Film DepositionJournal of Vacuum Science and Technology, 1971