A specimen stage with no microscope modifications used to perform EBIC in a STEM
- 1 December 1988
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 21 (12) , 1175-1178
- https://doi.org/10.1088/0022-3735/21/12/012
Abstract
Collecting the electron-beam-induced current inside a scanning transmission electron microscope permits an in situ correlation between the electrical activity and structure of a defect. This technique requires a special side-entry stage which the authors created from a bulk sample side-entry stage, originally intended for X-ray analysis. The design can easily be adapted to other scanning transmission electron microscopes.Keywords
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