High brightness laser/plasma source for high throughput submicron x-ray lithography
- 1 January 1985
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 3 (1) , 258-261
- https://doi.org/10.1116/1.583239
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: