A novel technique for shifter void defect repair by a focused ion beam tool

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3760-3764
• https://doi.org/10.1116/1.587438

Abstract

Keywords

• NOVEL TECHNIQUE
• BEAM TOOL
• ION BEAM
• DEFECT REPAIR
• SHIFTER VOID