Analyses and Corrections of Instrumental Errors in Ellipsometry
- 1 January 1970
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America
- Vol. 60 (1) , 57-63
- https://doi.org/10.1364/josa.60.000057
Abstract
Expressions for the errors produced in an ellipsometer due to an imperfect compensator, due to birefringence in windows of a cell containing the sample, and due to tilting of the sample are derived. Methods of analyzing the ellipsometer readings to eliminate these errors are given.Keywords
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