NEW HIGH INTENSITY ION SOURCE WITH VERY LOW EXTRACTION VOLTAGE

15 May 1970

journal article
research article
Published by AIP Publishing in Applied Physics Letters

Vol. 16 (10) , 401-404
https://doi.org/10.1063/1.1653043

Abstract

A new ion source is described, which produces slow ion beams of I +> 10−2 A cm−2 with extraction voltages V extr ≳ 10 2 V and a relatively small spread.

Keywords

ION BEAM