Numerical simulation of field emission from silicon

• 1 March 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (2) , 371-378
• https://doi.org/10.1116/1.586863

Abstract

Keywords

• SIMULATION
• TRANSMISSION COEFFICIENT
• FIELD EMISSION
• NUMERICAL SIMULATION
• MATERIALS SCIENCE
• WIGNER DISTRIBUTION
• SILICON
• WIGNER DISTRIBUTION FUNCTION