Projection photolithography by wave-front conjugation
- 1 June 1981
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America
- Vol. 71 (6) , 737-743
- https://doi.org/10.1364/josa.71.000737
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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