VHF PECVD microcrystalline silicon: from material to solar cells

• 1 March 2004
• journal article
• Published by Elsevier in Thin Solid Films
• Vol. 451-452, 269-273
• https://doi.org/10.1016/j.tsf.2003.11.021

Abstract

Keywords

• THIN FILM SILICON
• MICROCRYSTALLINE SILICON
• SOLAR CELLS
• VHF PECVD