Figures of merit for sputtered superlattices
- 15 August 1984
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 56 (4) , 1218-1219
- https://doi.org/10.1063/1.334052
Abstract
Two figures of merit for sputtered superlattices (FMSS) are proposed which allow a comparison of the quality of artificial superlattices prepared in different sputtering systems. These FMSS also demonstrate several conditions for optimizing the sputtering parameters which are not widely appreciated.This publication has 3 references indexed in Scilit:
- Electron tunneling into Nb/Al multilayers and into Nb with Al overlayersPhysica B+C, 1982
- X-ray scattering from multilayers of NbCuPhysical Review B, 1981
- New Class of Layered MaterialsPhysical Review Letters, 1980