Elevated ion charge states in vacuum arc plasmas in a magnetic field
- 10 July 1995
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 67 (2) , 200-202
- https://doi.org/10.1063/1.114666
Abstract
We report on measurements of the charge state distributions of ions formed in a vacuum arc plasma in a magnetic field. A vacuum arc ion source was used for plasma formation and ion beam extraction, and the charge state spectra were investigated using both magnetic and time‐of‐flight charge state diagnostics. We find that the charge states of all of the metal species investigated are significantly increased by a magnetic field of up to 6 kG. New high ion charge states are created, and the mean of the charge state distribution is increased by about 30% at 3.75 kG and 50% at 6 kG. The results are important fundamentally as well as being of relevance to vacuum arc ion source applications such as ion implantation and accelerator injection.Keywords
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