Preparation and Properties of Ru and RuO2 Thin Film Electrodes for Ferroelectric Thin Films
- 1 September 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (9S) , 5223-5226
- https://doi.org/10.1143/jjap.33.5223
Abstract
No abstract availableKeywords
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