New ion implant technique for low-cost solar cell fabrication

1 July 1981

journal article
conference paper
Published by AIP Publishing in Review of Scientific Instruments

Vol. 52 (7) , 1110-1111
https://doi.org/10.1063/1.1136721

Abstract

A new implant technique, in which a single magnet carries out mass separation and ion beam scanning, is described. Dose uniformity and energy conversion efficiency of a solar cell fabricated using this technique are investigated.

Keywords

SOLAR CELLS
ION IMPLANTATION
FABRICATION
MAGNETIC ANALYZERS
MASS SPECTROSCOPY
BEAM SCANNERS
EXPERIMENTAL DATA
ENERGY CONVERSION
EFFICIENCY
ACCURACY
ION BEAMS

This publication has 1 reference indexed in Scilit:

Microwave ion source
Review of Scientific Instruments, 1977