I n s i t u growth surface temperature measurement for molecular beam epitaxial growth of CdTe, ZnTe, and Cd1−xZnxTe alloys

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Abstract
Direct measurements of the growth surface temperatures of (001) CdTe, ZnTe, and Cd1−xZnxTe (x=0.1,0.25) epilayers were performed in situ by means of the condensation of Te2. Measurements were made over the technologically important 160–220 °C range for the molecular beam epitaxial growth of these materials. Condensation of Te2 was observed when the incident flux of Te2 exceeded the flux of Te2 desorbing from the substrate as calculated at the temperature of the substrate. The surface temperature for the onset of condensation of an incident beam of Te2 depends on the magnitude of the flux of the incident Te2 molecules. The epilayer surface temperature was calculated by equating the expressions for the incident Te2 flux and the desorbing Te2 flux. Experimentally, the condensation of Te2 was detected when transmission diffraction spots due to Te precipitates appeared, superimposed on the streaked reflection high-energy electron diffraction pattern of the substrate. The Te2 condensation temperature measurements were reproducible to within 3 °C. The technique is accurate to better than 5 °C in absolute terms for measurements on (001) CdTe surfaces and 8 °C for (001) ZnTe and Cd1−xZnxTe surfaces.

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