Capacitive humidity sensing properties of hydrothermally-etched silicon nano-porous pillar array
- 22 July 2004
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 105 (2) , 219-222
- https://doi.org/10.1016/j.snb.2004.06.004
Abstract
No abstract availableKeywords
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