High spatial resolution quantitative microwave impedance microscopy by a scanning tip microwave near-field microscope
- 29 September 1997
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 71 (13) , 1872-1874
- https://doi.org/10.1063/1.120444
Abstract
A recently developed scanning tip microwave near-field microscope has been improved to achieve a spatial resolution of 100 nm (∼λ/106). Furthermore, explicit calculations of the field distribution using a simplified model allow quantitative microscopy of dielectric properties for dielectric materials. A detection sensitivity of δε/ε∼6×10−4 has been achieved.Keywords
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