CVD Silicon Carbide Components

• 1 January 1987
• book chapter
• Published by Wiley
• p. 958-967
• https://doi.org/10.1002/9780470320402.ch54

Abstract

Keywords

• CHEMICAL VAPOR DEPOSITION (CVD)
• MONOLITHIC COMPONENTS
• SACRIFICIAL GRAPHITE SUBSTRATE
• FABRICATION DEVELOPMENT
• TRILAYER STRUCTURE