Micrascan III: 0.25-um resolution step-and-scan system
- 7 June 1996
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 2726, 780-786
- https://doi.org/10.1117/12.240939
Abstract
Catadioptric step-and-scan lithography offers specific advantages over step-and-repeat all- refractive (dioptric) systems as resolution requirements drive to 0.25micrometers in volume production. For the Micrascan family of step-and-scan tools this step in the evolutionary path from 0.35micrometers to 0.25micrometers has involved changes to both the projection optics and illumination system.Keywords
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