Selective Oxide Coating of Silicon Gate (SELOCS)

• 1 January 1979
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 18  (S1)
• https://doi.org/10.7567/jjaps.18s1.255

Abstract

Keywords

• SELOCS
• SILICON
• OXIDE COATING
• GATE
• SELECTIVE OXIDE
• LINE CARD
• CARD CLEARANCE