HTSC thin film growth by inverted cylindrical magnetron sputtering
- 1 August 1992
- journal article
- Published by Springer Nature in Journal of Superconductivity
- Vol. 5 (4) , 345-351
- https://doi.org/10.1007/bf00618134
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Systematic studies of HTSC thin film growth by ICM-sputteringPhysica C: Superconductivity and its Applications, 1991
- Quaternary phase relations near YBa2Cu3O6+x at 850°C in reduced oxygen pressuresPhysica C: Superconductivity and its Applications, 1990
- Properties of epitaxial YBa2Cu3O7 thin films on Al2O3 {1̄012}Applied Physics Letters, 1990
- Direct production of crystalline superconducting thin films of YBa2Cu3O7 by high-pressure oxygen sputteringSolid State Communications, 1988