Measurements of Diffusion Coefficient of CF2 Radical in DC Pulsed CF4 Discharge Plasma
- 1 October 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (10A) , L1469
- https://doi.org/10.1143/jjap.32.l1469
Abstract
Laser-induced fluorescence has been used to measure the CF2 radical ground-state densities after extinction of DC pulsed CF4 discharge plasma. From the measurement, the CF2 radical was shown to be removed mainly by a diffusion process. Its diffusion coefficient was found to be D=65 cm2·Torr·s-1 in CF4 at room temperature.Keywords
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