Silicon micromachined infrared sensor with tunable wavelength selectivity for application in infrared spectroscopy
- 1 March 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 47 (1-3) , 413-416
- https://doi.org/10.1016/0924-4247(94)00932-8
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- A tunable “spectrometerdiode” with a spectral resolution of 3 nm in the 660–900 nm rangeSensors and Actuators A: Physical, 1991