Langmuir probe measurements of the electron energy distribution function in radio-frequency plasmas
- 1 July 1992
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 10 (4) , 1207-1211
- https://doi.org/10.1116/1.578228
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: