Untersuchungen zur Photolyse und Thermolyse von Positivphotoresisten
- 1 January 1990
- journal article
- other
- Published by Wiley in Zeitschrift für Chemie
- Vol. 30 (1) , 28-29
- https://doi.org/10.1002/zfch.19900300115
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Design Of A Positive Photoresist For Submicron Imaging Assisted By SAMPLE SimulationPublished by SPIE-Intl Soc Optical Eng ,1988