OPTICAL PROPERTIES OF THIN FILMS ON ROUGH SURFACES

Abstract
A general theory, of second order in the film thickness and surface roughness, is developed of the optical properties of a thin continuous film. These properties are described by a small number of electromagnetic constitutive coefficients. Formulae for these coefficients are derived in terms of the height-height correlation functions of the upper and lower surfaces of the film, and its average thickness. The reflectance, transmittance and ellipsometric coefficient are expressed in terms of the constitutive coefficients, for arbitrary angles of incidence. The results of this work are also studied in the long wave length limit of surface roughness and compared with results, obtained earlier by Ohlídal and co-workers
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