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Low Dielectric Constant Materials for Interlayer Dielectrics
Home
Publications
Low Dielectric Constant Materials for Interlayer Dielectrics
Low Dielectric Constant Materials for Interlayer Dielectrics
HT
H Treichel
H Treichel
BW
B Withers
B Withers
GR
G Ruhl
G Ruhl
PA
P Ansmann
P Ansmann
RW
R Wurl
R Wurl
CM
C Muller
C Muller
MD
M Dietlmeier
M Dietlmeier
GM
G Maier
G Maier
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1 January 1999
book chapter
Published by
Elsevier
p.
1-71
https://doi.org/10.1016/b978-012513905-2/50003-0
Abstract
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