Discussion of “The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and Steam” [B. E. Deal (pp. 527–533, Vol. 110, No. 6)]
- 1 January 1963
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 110 (12) , 1292
- https://doi.org/10.1149/1.2425653