Solid Solution in the Silicon Nitride-Silicon Dioxide System

• 1 January 1969
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 116  (6) , 862-863
• https://doi.org/10.1149/1.2412079

Abstract

Keywords

• SOLID SOLUTION
• DIOXIDE SYSTEM
• NITRIDE SILICON DIOXIDE
• SILICON NITRIDE SILICON