Interferometric lithography of sub-micrometer sparse hole arrays for field-emission display applications
- 1 September 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 14 (5) , 3339-3349
- https://doi.org/10.1116/1.588533
Abstract
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