Miniature electrostatic motor
- 1 May 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 24 (1) , 43-46
- https://doi.org/10.1016/0924-4247(90)80046-8
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- IC-processed electrostatic micromotorsSensors and Actuators, 1989
- Design considerations for micromachined electric actuatorsSensors and Actuators, 1988
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987
- Computer Calculation of Electrical FieldsIEEE Transactions on Electrical Insulation, 1986