ChemInform Abstract: Fluorine-Enhanced Oxidation of Silicon. Effects of Fluorine on Oxide Stress and Growth Kinetics.
- 22 August 1991
- journal article
- abstracts
- Published by Wiley in ChemInform
- Vol. 22 (34)
- https://doi.org/10.1002/chin.199134005
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Fluorine‐Enhanced Oxidation of Silicon: Effects of Fluorine on Oxide Stress and Growth KineticsJournal of the Electrochemical Society, 1991