High-Energy Sputtering
- 1 March 1960
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 31 (3) , 447-450
- https://doi.org/10.1063/1.1735605
Abstract
Sputtering ratios for copper have been determined in the energy ranges 5–40 kev for bombardment by Ar+, He+, and D+. Argon values range from 6.48 at 5 kev to 9.25 at 27.5 kev, deuterium from 0.048 at 10 kev to 0.023 at 44 kev, and helium from 0.23 at 15 kev to 0.75 at 40 kev. Preliminary data are included for 30‐kev sputtering of copper by H+(0.011), D+(0.03), He+(0.13), N+(5.28), Ne+(3.61), Ar+(9.02), CU+(9.60), Kr+(15.15), and U+(20.9). Also included are sputtering ratios at 30 kev for Ar+ on Ta(2.7), Mo(3.31), and Al(2.38). Most of these data are the result of a single measurement, and require further verification. A definite pressure dependence of the sputtering ratio for Ar+ on Cu was found in the range of 0.04 to 0.08 μ.This publication has 4 references indexed in Scilit:
- Measurements and Collision—Radiation Damage Theory of High-Vacuum SputteringPhysical Review B, 1955
- Sputtering by Ion BombardmentPublished by Elsevier ,1955
- Cathodic sputtering an analysis of the physical processesVacuum, 1953
- Kathodenzerstäubung bei sehr geringen GasdrückenThe European Physical Journal A, 1930