High Depth Resolution SIMS Analysis with Low-energy Grazing O2+ Beams

• 1 April 1997
• journal article
• research article
• Published by Wiley in Surface and Interface Analysis
• Vol. 25  (4) , 285-291
• https://doi.org/10.1002/(sici)1096-9918(199704)25:4<285::aid-sia235>3.0.co;2-0

Abstract

Keywords

• SIMS
• HIGH DEPTH RESOLUTION