Compact large-range cryogenic scanner
- 1 March 1995
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 66 (3) , 2520-2523
- https://doi.org/10.1063/1.1145652
Abstract
We describe the construction and operation of a large‐range piezoelectric scanner, suitable for various scanning probe microscopies such as magnetic force, atomic force, and Hall probe microscopies. The instrument is compact and inherently thermally compensated. At room temperature, it has a range of over 2 mm; this range is reduced to 275 μm at 4.2 K. © 1995 American Institute of PhysicsKeywords
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