A review of the mechanical tests for assessment of thin‐film adhesion

• 1 May 1989
• journal article
• review article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 7  (3) , 2267-2272
• https://doi.org/10.1116/1.575926

Abstract

Keywords

• THIN FILM
• MECHANICAL TESTS
• REVIEW
• FILM ADHESION
• ASSESSMENT