Atomic force microscope tip radius needed for accurate imaging of thin film surfaces

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3176-3181
• https://doi.org/10.1116/1.587495

Abstract

Keywords

• THIN FILM
• ATOMIC FORCE MICROSCOPE