SiGe/Si electronics and optoelectronics

• 1 May 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (3) , 1159-1167
• https://doi.org/10.1116/1.586832

Abstract

Keywords

• SIGE/SI ELECTRONICS AND OPTOELECTRONICS