Atomistic Simulation of Low-Energy Beam Deposition
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Atomistic simulation of silicon beam depositionPhysical Review B, 1987
- Development of a many-body Tersoff-type potential for siliconPhysical Review B, 1987
- The Stopping and Range of Ions in SolidsPublished by Springer Nature ,1982