Spectral tuning of ArF and KrF discharge lasers
- 1 February 1978
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 32 (3) , 171-173
- https://doi.org/10.1063/1.89978
Abstract
Simple prism tuning of a well‐passivated double‐discharge excimer laser has resulted in tuning ranges of better than 20 Å in both ArF and KrF. Neither tuning is continuous, being interrupted by nonlasing holes in regions of self‐absorption. A two‐prism dispersive chain results in a linewidth of 1–2 Å for KrF and less than 0.5 Å for ArF.Keywords
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