An ion-plating apparatus incorporating a d.c. plasma gun with an LaB6 cathode
- 1 December 1990
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 43-44, 1056-1064
- https://doi.org/10.1016/0257-8972(90)90044-d
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Development of an aluminum alloy valve for an extremely high vacuum systemJournal of Vacuum Science & Technology A, 1990
- High‐vacuum degassing furnace made from aluminum alloy and its thermal characteristicsJournal of Vacuum Science & Technology A, 1989
- Lanthanum hexaboride hollow cathode for dense plasma productionReview of Scientific Instruments, 1978