Atomic steps on a silicon (001) surface tilted toward an arbitrary direction

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Abstract
In this letter, we show that the misorientation of a vicinal (001) surface annealed in hydrogen is accommodated by a pair of near-Sa steps which are evolved in two perpendicular {110} independently and coordinately. We demonstrate that the deviation of surface orientation in a tiny area can be readily evaluated by inspecting the local variation of the near-Sa step pair. We finally indicate that the atomic steps on a surface annealed in argon exhibit in contrast, no conformity with the misorientation towards an azimuth other than {110}.

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